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产品名称:热处理系统
产品型号:MATr
产品厂商:Tokyo Electron
欲购买或租赁热处理系统
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Tokyo Electron MATr 热处理系统

Features

MATr is a flexible magnetic annealing tool for up to 200mm wafers, suitable for process development and low volume production. It provides magnetic fields up to 2 Tesla and batch sizes of up to 10 wafers. A closed cycle superconducting magnet provides a fully variable magnetic field in a compact package. Active magnetic shielding system is used to minimize the mass and stray magnetic field of the tool, making it suitable for installation in laboratory environments. A range of options are provided that allow the customer to match their process needs and budget with the tool configuration.

Applications

Laboratory Usage, Process Development

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